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High PrecisionInertia lMeasurement Unit
The XUAN-Accelerometer series is a uniaxial capacitanceMEMS accelerometer composed of all-silicon MEMSsensitive structure and low power signal processing ASlC.
XUAN -Accelerometer series is a digital output MEMSaccelerometer based on MEMS processing technology, highperformance ASlC and MEMS sensitive components, singlepower supply (5V), typical low power consumption (11 mA).
The output is SPl protocol digital signal or full differenceanalog signal (common mode voltage 2.5V), and the analogoutput full range output voltage is between 0.5V and 4.5V.
The sensor uses the LCc20 ceramic tube shell packagingNoise, dynamic range, nonlinearity, repeatability,temperature drift, impact resistance, with SPl digital interfacesupport in-chip temperature compensation. lt is mainly usedin inertia, tilt, vibration.
